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Type: 
Journal
Description: 
A relative humidity (RH) sensor device based on n-type porous silicon has been designed, fabricated and characterized. The simple device is a diode reverse dc biased, exhibiting an extremely high sensitivity in ambient air and a large operating range (30–70% RH). Aging and NO2 interference on the sensor performance have been also investigated.
Publisher: 
Elsevier
Publication date: 
11 Nov 2005
Authors: 

G Di Francia, A Castaldo, E Massera, I Nasti, L Quercia, I Rea

Biblio References: 
Volume: 111 Pages: 135-139
Origin: 
Sensors and Actuators B: Chemical