-A A +A
Type: 
Journal
Description: 
The principle of the digital holography (DH) technique and the potentialities of the method are considered. Experimental results obtained using the DH microscopy technique for characterizing microelectromechanical systems (MEMS) are presented and discussed.
Publisher: 
Taylor & Francis
Publication date: 
1 Jun 2006
Authors: 

S Baltiysky, I Gurov, S De Nicola, P Ferraro, A Finizio, G Coppola

Biblio References: 
Volume: 54 Issue: 2 Pages: 103-110
Origin: 
The imaging science journal