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Type: 
Book
Description: 
In this communication, the compatibility of porous silicon and anodic bonding (AB) technologies for the realization of sensing micro components in lab-on-chip applications has been demonstrated. The two techniques have been combined for the fabrication of a chemical sensor, in view of its miniaturization and integration with a smart micro-dosage system. For this application a very quick and low temperature AB process is essential in order to prevent pores filling with thermal oxides.
Publisher: 
Publication date: 
1 Jan 2008
Authors: 

LUCA DE STEFANO, LUCIA ROTIROTI, K MALECKI, IVO RENDINA, FG DELLA CORTE, LUIGI MORETTI

Biblio References: 
Pages: 450-456
Origin: 
Sensors And Microsystems