Sensing devices based on ZnO films deposited by RF sputtering have been investigated. Their sensing properties have been found dependent on film deposition parameters and post-deposition treatments such as thermal annealing and sensor working temperature. The fabricated sensors were found suitable for automotive applications in the control and prevention of CO contamination into the vehicle cabin and detection of hydrogen combustible gas leaks in fuel cell cars.
1 Jan 2009
Sensors And Microsystems