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Type: 
Journal
Description: 
Publisher: 
Pergamon
Publication date: 
1 Feb 2016
Authors: 

Maria Cantarella, Ruy Sanz, Maria Antonietta Buccheri, Lucia Romano, Vittorio Privitera

Biblio References: 
Volume: 42 Pages: 58-61
Origin: 
Materials Science in Semiconductor Processing