The crystallization kinetics of as-deposited and ion implanted amorphous Ge2Sb2Te5 thin films has been measured by time resolved reflectivity. An enhancement of the crystallization process occurred in the implanted samples. Raman scattering analysis was used to correlate the stability of the amorphous phase to its structure. The variation of the Raman signal after ion irradiation is consistent with a reduction in Ge–Te tetrahedral bonds, characteristic of the Ge coordination in amorphous Ge2Sb2Te5.
American Institute of Physics
16 Jun 2008
Volume: 92 Issue: 24 Pages: 241925
Applied Physics Letters