-A A +A
Type: 
Journal
Description: 
Publisher: 
Woodbury, NY: Published for the Society by the American Institute of Physics, 1991-
Publication date: 
1 Jan 2006
Authors: 

E Napolitani, D De Salvador, M Pesce, A Carnera, S Mirabella, F Priolo

Biblio References: 
Volume: 24 Issue: 1 Pages: 394-398
Origin: 
Journal of Vacuum Science and Technology-Section B