Stoichiometric Er silicate thin films, monosilicate (Er 2 SiO 5) and disilicate (Er 2 Si 2 O 7), have been grown on c-Si substrates by rf magnetron sputtering. The influence of annealing temperature in the range 1000–1200 C in oxidizing ambient (O 2) on the structural and optical properties has been studied. In spite of the known reactivity of rare earth silicates towards silicon, Rutherford backscattering spectrometry shows that undesired chemical reactions between the film and the substrate can be strongly limited by using rapid thermal treatments. Monosilicate and disilicate films crystallize at 1100 and 1200 C, respectively, as shown by x-ray diffraction analysis; the crystalline structures have been identified in both cases. Moreover, photoluminescence (PL) measurements have demonstrated that the highest PL intensity is obtained for Er 2 Si 2 O 7 film annealed at 1200 C. In fact, this treatment allows us to reduce the …