This paper presents the design of distributed MEMS phase shifters by means of the image-parameters method. The proposed analytic approach utilizes a more precise modeling of the MEMS device with respect to that one usually adopted in literature. The most important analytic aspects concerning the synthesis technique are presented. As a demonstration of the method a structure characterized by a differential phase shift value of 90° is designed and simulated, exhibiting very good electric performance.
1 Apr 2014
2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)