-A A +A
Two different topologies of radio frequency micro-electro-mechanical system (RF MEMS) series ohmic switches (cantilever and clamped–clamped beams) in coplanar waveguide (CPW) configuration have been characterized by means of DC, environmental, and RF measurements. In particular, on-wafer checks have been followed by RF test after vibration, thermal shocks, and temperature cycles. The devices have been manufactured on high resistivity silicon substrates, as building blocks to be implemented in different single-pole 4-throw (SP4 T), double-pole double-throw (DPDT) configurations, and then integrated in Low Temperature Co-fired Ceramics (LTCC) technology for the realization of large-order Clos 3D networks.
Cambridge University Press
Publication date: 
1 Aug 2012

Giorgio De Angelis, Andrea Lucibello, Emanuela Proietti, Romolo Marcelli, Giancarlo Bartolucci, Federico Casini, Paola Farinelli, Giovanni Mannocchi, Sergio Di Nardo, Daniele Pochesci, Benno Margesin, Flavio Giacomozzi, Olivier Vendier, Taeyoung Kim, Larissa Vietzorreck

Biblio References: 
Volume: 4 Issue: 4 Pages: 421-433
International Journal of Microwave and Wireless Technologies