The technology for the realization of RF MEMS ohmic series switches on LTCC substrates has been set up for their implementation in true time delay line configurations. Alumina and LTCC structures for validating the technological process on the individual switches have been obtained and characterized. Static delay lines on LTCC have been manufactured and tested to get the expected electrical performances for the final configuration.
27 Oct 2008
2008 European Microwave Integrated Circuit Conference