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Type: 
Journal
Description: 
The reliability of RF MEMS switches is typically reduced by charging effects occurring in the dielectrics. The aim of this paper is to discuss these effects, and to propose analytical and equivalent circuit models which account for most of the physical contributions present in the structure.
Publisher: 
Springer-Verlag
Publication date: 
1 Jul 2010
Authors: 

Romolo Marcelli, Giancarlo Bartolucci, George Papaioannu, Giorgio De Angelis, Andrea Lucibello, Emanuela Proietti, Benno Margesin, Flavio Giacomozzi, François Deborgies

Biblio References: 
Volume: 16 Issue: 7 Pages: 1111-1118
Origin: 
Microsystem technologies