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Type: 
Journal
Description: 
In this work, the authors present a technique for the local characterization of the dielectric properties of materials. More in details, a setup will be described, and the related measurement modeling will be discussed. In this way, it is possible to obtain a calibrated and nondestructive determination of the dielectric constant in a submicrometric region; the detection of any surface or buried metallization is a straightforward application for microelectronics. The analysis is performed as a function of the frequency in the microwave range and, further on, the data can be transformed in time domain for one dimensional tomography. The authors will show that microwave spectroscopy can be performed by means of standard coaxial pins employed as probes for measurements both in reflection and transmission mode, giving the information of the frequency dependent properties of the exploited material or structure by means of …
Publisher: 
AVS
Publication date: 
5 Jan 2017
Authors: 

Andrea Lucibello, Christopher Hardly Joseph, Emanuela Proietti, Giovanni Maria Sardi, Giovanni Capoccia, Romolo Marcelli

Biblio References: 
Volume: 35 Issue: 1 Pages: 01A113
Origin: 
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena