Micromachined MEMS switches for microwave applications have been manufactured, tested and modelled. A series, coplanar waveguide (CPW) configuration has been studied, with the aim to improve the contact resistance. In particular, contact dimples have been included and the shape of the movable bridge has been changed by adding deformable wing-like extensions. Single switch devices have been tested between 0.045 MHz and 40 GHz by measuring on-wafer the scattering electrical parameters.
1 Jan 2005
Sensors And Microsystems