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Type: 
Journal
Description: 
The self-assembly (SA) of diblock copolymers (DBCs) based on phase separation into different morphologies of small and high-density features is widely investigated as a patterning and nanofabrication technique. The integration of conventional top-down approaches with the bottom-up SA of DBCs enables the possibility to address the gap in nanostructured lateral length standards for nanometrology, consequently supporting miniaturization processes in device fabrication. On this topic, we studied the pattern characteristic dimensions (i.e., center-to-center distance L0 and diameter D) of a cylinder-forming polystyrene-b-poly( methyl methacrylate) PS-b-PMMA (54 kg mol–1, styrene fraction 70%) DBC when confined within periodic SiO2 trenches of different widths (W, ranging between 75 and 600 nm) and fixed length (l, 5.7 μm). The characteristic dimensions of the PMMA cylinder structure in the confined …
Publisher: 
American Chemical Society
Publication date: 
26 Apr 2017
Authors: 

Giulia Aprile, Federico Ferrarese Lupi, Matteo Fretto, Emanuele Enrico, Natascia De Leo, Luca Boarino, Flavio Giovanni Volpe, Gabriele Seguini, Katia Sparnacci, Valentina Gianotti, Michele Laus, Jørgen Garnæs, Michele Perego

Biblio References: 
Volume: 9 Issue: 18 Pages: 15685-15697
Origin: 
ACS applied materials & interfaces