Type:
Journal
Description:
In the last few years Programmable Micro Diffraction Gratings (PMDG) have shown the possibility to be applied in many areas, spanning from imaging, to telecommunication, to spectroscopy. These devices were mainly based on Micro-Electro-Mechanical Systems (MEMS) techniques and realized by moveable mirrors and pop-up structures. Although this approach have held a central stage in Micro-Opto-Electro-Mechanical-Systems (MOEMS), they made the realized devices delicate and not useful for ...
Publisher:
Publication date:
18 May 2007
Biblio References:
Volume: 6593 Pages: 37-47
Origin:
Proc of SPIE