[en] This paper reports a new concept of micromechanical sensors of temperature. The sensors consist of a micro-cantilever transducer and optical readout means for monitoring cantilever mechanical response using the surface plasmons resonance (SPR) phenomenon. This solution has the advantage of reducing the cantilever length due to an ultrahigh resolution of the optical readout means and, therefore a high signal-to-noise ratio can be achieved.
International Frequency Sensor Association (IFSA)
23 Jul 2008
Volume: 96 Issue: 9 Pages: 8-17
Sensors and Transducers Journal