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Type: 
Conference
Description: 
An innovative microheater array design is realized on a lithium niobate (LiNbO 3) crystal, to induce a uniform pyroelectric field on a larger area of 12.5× 12.5 mm 2. The pyroelectric effect is activated by the crystal as a result of the temperature gradient produce by the microheater. Thermal analyses of the device were performed both numerically and experimentally using COMSOL TM multiphysics and FLIR thermocamera. The optimized microheater geometry was obtained by a series of preliminary simulations performed using the COMSOL. The optimized microheater was then realized on the+ Z surface of LiNbO 3 crystal using fabrication techniques involving: photolithography, titanium thin film deposition and lift off. A series of electro-thermal characterizations were performed on the realized device. The results obtained during the experimental measurements shows a good agreement with the numerical model in …
Publisher: 
Begel House Inc.
Publication date: 
1 Jan 2017
Authors: 

Shomnath Bhowmick, Orlando Leo, Giuseppe Coppola, Mariano Gioffrè, Mario Iodice, Marilena Musto, Giuseppe Rotondo

Biblio References: 
Origin: 
ICHMT DIGITAL LIBRARY ONLINE