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Type: 
Conference
Description: 
Aluminum nitride (AlN) thin films were deposited by sputtering on Ti bottom electrodes and integrated on a kapton substrate for flexible and stretchable electronics. The aim of this work was to find the best combination of Ti underlayer sputtering conditions and AlN over-growth to obtain the (002) nitride orientation, fundamental requirement for the piezoelectric response of the material in piezoelectric devices. Flexible electronics represent today’s cutting-edge electronic technologies thanks to their low cost and easy fabrication scalability.
Publisher: 
Springer, Cham
Publication date: 
21 Feb 2017
Biblio References: 
Pages: 41-48
Origin: 
AISEM Annual Conference on Sensors and Microsystems