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Type: 
Conference
Description: 
MIM capacitors made by the same structures and materials commonly used for the actuation of RF MEMS switches have been systematically investigated, to get information about the charging effects induced by the actuation pads.
Publisher: 
FBK-Publishing services
Publication date: 
1 Jan 2009
Authors: 

G De Angelis, A Lucibello, Flavio Giacomozzi, Benno Margesin, G Bartolucci, R Marcelli

Biblio References: 
Pages: 121-124
Origin: 
MEMSWAVE 2009, 10th international Symposium on RF MEMS and RF Microsystems