Aarik, J, Akbashev, AR, Bechelany, M, Berdova, M, Cameron, D, Chekurov, N, Drozd, V, Elliott, S, Gottardi, G, Grigoras, K, Junige, M, Kallio, T, Kanervo, J, Koshtyal, Y, Kääriäinen, ML, Kääriäinen, T, Lamagna, L, Malkov, A, Malygin, A, Molarius, J, Ozgit-Akgun, C, Pedersen, H, Puurunen, RL, Pyymaki-Perros, A, Ras, RHA, Roozeboom, F, Sajavaara, T, Savin, H, Seidel, TE, Sundberg, P, Sundqvist, J, Tallarida, M, van Ommen, JR, Wächtler, T, Wiemer, C & Ylivaara, O 2014, Overview of early publications on atomic layer deposition. in Technical Program & Abstracts. American Vacuum Society (AVS), 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14 … Overview of early publications on atomic layer deposition. / Aarik, Jaan; Akbashev, Andrew R.; Bechelany, Mikhael; Berdova, Maria; Cameron, David; Chekurov, Nikolai; Drozd, Viktor; Elliott, Simon; Gottardi, Gloria; …