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Preliminary results of 150mm 4H-SiC 4 off have been obtained with the new 150 mm automatic horizontal hot wall reactor PE1O6, using chlorinated chemistry (SiHCl< sub> 3+ C< sub> 2 H< sub> 4). A new injection system has been tested in two configurations and results will be shown in this paper. AFM surface roughness measurements and epi defect density have been reported.[ABSTRACT FROM AUTHOR] Copyright of Materials Science Forum is the property of Trans Tech Publications, Ltd and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material …
Publication date: 
20 Mar 2014

Marco Mauceri, Antonino Pecora, Grazia Litrico, Carmelo Vecchio, Marco Puglisi, Danilo Crippa, Nicolo’ Piluso, Massimo Camarda, Francesco La Via

Biblio References: 
Materials Science Forum