Type:
Journal
Description:
Calcium copper titanate, CaCu3Ti4O12 (CCTO), thin films have been fabricated by Metal Organic Chemical Vapor Deposition (MOCVD) on LaAlO3(100) single crystal substrates. Depositions have been carried out from a molten mixture consisting of the Ca(hfa)2•tetraglyme, Ti(tmhd)2(O-iPr)2, and Cu(tmhd)2 [Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione; tetraglyme = 2,5,8,11,14-pentaoxapentadecane; Htmhd = 2,2,6,6-tetramethyl-3,5-heptandione; O-iPr = iso-propoxide] precursors. Post-deposition annealing treatments have been performed at 1100 °C for long time (24 h) as well as by rapid thermal annealing (RTA) processes. Since structural and chemical properties of CCTO ceramics greatly affect the resulting dielectric properties, accurate structural, morphological and compositional characterizations of the annealed samples have been performed by X-ray diffraction, field emission scanning electron …
Publisher:
Elsevier
Publication date:
25 Sep 2007
Biblio References:
Volume: 201 Issue: 22-23 Pages: 9243-9247
Origin:
Surface and Coatings Technology