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Type: 
Conference
Description: 
In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability.
Publisher: 
Publication date: 
1 Jan 2017
Authors: 

Romolo Marcelli, Andrea Lucibello, Giovanni Capoccia, Emanuela Proietti, Giovanni Maria Sardi, Christopher Hardly Joseph, Loukas Michalas, Giancarlo Bartolucci, Ferry Kienberger, Georg Gramse, Manuel Kasper

Biblio References: 
Pages: 29-36
Origin: 
2017 International Semiconductor Conference (CAS)