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Type: 
Journal
Description: 
Large‐scale sub‐20 nm regular pattern obtained by self‐assembly of di‐block copolymers. The combination of reference free grazing incidence X‐ray fluorescence (GIXRF) and GIXAS techniques enables a complete characterization of such a 3D system and provides a potential calibration sample for 3D analytical techniques. This is reported by Masoud Dialameh and co‐workers in article 1700866.
Publisher: 
Publication date: 
1 Mar 2018
Authors: 

Masoud Dialameh, Federico Ferrarese Lupi, Philipp Hönicke, Yves Kayser, Burkhard Beckhoff, Thomas Weimann, Claudia Fleischmann, Wilfried Vandervorst, Pavo Dubček, Branko Pivac, Michele Perego, Gabriele Seguini, Natascia De Leo, Luca Boarino

Biblio References: 
Volume: 215 Issue: 6 Pages: 1870010
Origin: 
physica status solidi (a)