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Aluminium Implantation in Germanium: Uphill Diffusion, Electrical Activation, and Trapping

Type:

Journal

Description:

CiNii 国立情報学研究所学術情報ナビゲータ[サイニィ]. メニュー検索 …

Publisher:

Publication date:

1 Jan 2006

Authors:

Giuliana Impellizzeri, Enrico Napolitani, Simona Boninelli, Vittorio Privitera, Trudo Clarysse, Wilfried Vandervorst, Francesco Priolo

Biblio References:

Volume: 24 Pages: 381

Origin:

J. Vac. Sci. Technol. B

Link:

https://ci.nii.ac.jp/naid/10030155211/