Type:
Book
Description:
Thermal conductivity measurement by micromachined test structures permits to evaluate the microscale variations of thermal conductivity on different devices. We used this technique to measure polysilicon thermal conductivity with particular concern to investigating its dependence on annealing temperature and doping type.
Publisher:
Publication date:
1 Jan 2008
Biblio References:
Pages: 267-271
Origin:
Sensors And Microsystems