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Type: 
Conference
Description: 
Activation of surface segregated dopants above the solid solubility limit in a high Ge content SiGe substrate has been demonstrated by nanosecond melt UV laser anneal. This exceeds the activation possible with conventional solid-phase annealing technics. The segregation effects, strongly amplified by the phase changing of the partial melting of the sample during the annealing, play a key role explaining dopant profile redistribution in Si-Ge alloys and activation.
Publisher: 
IEEE
Publication date: 
16 Sep 2018
Authors: 

Toshiyuki Tabata, Joris Aubin, Karim Huet, Fulvio Mazzamuto, Yoshihiro Mori, Antonino La Magna, Leonard M Rubin, Petros Kopalidis, Hao-Cheng Tsai, Dwight Roh, Ronald Reece

Biblio References: 
Pages: 353-356
Origin: 
2018 22nd International Conference on Ion Implantation Technology (IIT)