Type:
Journal
Description:
Here, we present a suitable advancement of parallel local oxidation nanolithography, demonstrating its feasibility in alternate current mode (AC-PLON). For demonstration, we fabricated model structures consisting of an array of parallel nanostripes of electrochemical SiOx with a controlled roughness. Besides, we proved the repeatability of AC-PLON and its integrability with conventional parallel local oxidation nanolithography.
Publisher:
RSC
Publication date:
9 Oct 2019
Biblio References:
Volume: 1 Issue: 10 Pages: 3887-3891
Origin:
Nanoscale Advances