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We study the growth of InN films on In2O3(111) substrates by plasma-assisted molecular beam epitaxy under N excess. InN films deposited directly on In2O3(111) exhibit a strongly faceted morphology. A nitridation step prior to growth is found to convert the In2O3(111) surface to InN{0001}. The morphology of InN films deposited on such nitridated In2O3(111) substrates is characteristic for growth by instable step-flow and is thus drastically different from the three-dimensional growth obtained without nitridation. We show that this change originates from the different polarity of the films: while InN films deposited directly on In2O3(111) are In-polar, they are N-polar when grown on the nitridated substrate.
Publication date: 
30 Apr 2016

YongJin Cho, Sergey Sadofev, Sergio Fernández-Garrido, Raffaella Calarco, Henning Riechert, Zbigniew Galazka, Reinhard Uecker, Oliver Brandt

Biblio References: 
Volume: 369 Pages: 159-162
Applied Surface Science