The lifetime of the surface plasmon in sputtered Ag ultrathin films on Cu(111) was investigated by high‐resolution electron energy loss spectroscopy measurements. The linewidth of the surface plasmon was found to follow a square‐root dependence on the fluence. Such finding allows the tuning of the lifetime of the plasmonic excitation upon sputtering and has general implications in plasmon‐based spectroscopies and in plasmon‐mediated processes across the films and at their surfaces. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)