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Type: 
Journal
Description: 
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Publisher: 
ELSEVIER SCI LTD
Publication date: 
1 Jan 2019
Authors: 

Giuseppe Greco, Anelia Kakanakova-Gueorguieva, Piotr Kruszewski, Bela Pecz

Biblio References: 
Volume: 102
Origin: 
Materials Science in Semiconductor Processing