3× 1018-1× 1019 cm-3 Al+ ion implanted 4H-SiC: annealing time effect | IMM Container

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3× 1018-1× 1019 cm-3 Al+ ion implanted 4H-SiC: annealing time effect

Type:

Journal

Description:

Publisher:

Trans Tech Publications Ltd

Publication date:

28 Aug 2020

Authors:

Roberta Nipoti, Antonella Parisini, Virginia Boldrini, Salvatore Vantaggio, Mariaconcetta Canino, Michele Sanmartin, Giovanni Alfieri

Biblio References:

Volume: 1004 Pages: 683-688

Origin:

Materials Science Forum

Link:

https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…