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One of the main issues with micron-sized intracortical neural interfaces (INIs) is their long-term reliability, with one major factor stemming from the material failure caused by the heterogeneous integration of multiple materials. Single crystalline cubic silicon carbide (3C-SiC) has the benefit of demonstrated biocompatibility, which makes it a promising candidate for chronically stable, implantable INIs. Here, we report on the fabrication and initial electrochemical characterization of a nearly monolithic, Michigan-style 3C-SiC microelectrode array probe. The probe consists of a single 5 mm-long shank with 16 electrode sites. An ~8 μm-thick p-type 3C-SiC epilayer was grown on a silicon-on-insulator (SOI) wafer, which was followed by a ~2 μm-thick epilayer of heavily n-type (n+) 3C-SiC in order to form conductive traces and the electrode sites. Diodes formed between the p and n+ layers provided substrate isolation …
National Academy of Inventors
Publication date: 
28 Jun 2021

Mohammad Beygi, John T Bentley, Christopher L Frewin, Cary A Kuliasha, Arash Takshi, Evans K Bernardin, Francesco La Via, Jack Judy, Stephen E Saddow

Biblio References: 
Volume: 22 Issue: 1 Pages: 105-118
Technology & Innovation