Multiscale Simulations of Plasma Etching in Silicon Carbide Structures | IMM Container

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Multiscale Simulations of Plasma Etching in Silicon Carbide Structures

Type:

Conference

Description:

Publisher:

Trans Tech Publications Ltd

Publication date:

1 Jan 2022

Authors:

Markus Italia, Ioannis Deretzis, Alfio Nastasi, Silvia Scalese, Antonino La Magna, Massimo Pirnaci, Daniele Pagano, Dario Tenaglia, Patrizia Vasquez

Biblio References:

Volume: 1062 Pages: 214-218

Origin:

Materials Science Forum

Link:

https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…