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High aspect ratio tilted gratings through local electric field modulation in plasma etching

Type: 
Journal
Description: 
Publisher: 
North-Holland
Publication date: 
30 Jun 2022
Authors: 

Zhitian Shi, Konstantins Jefimovs, Antonino La Magna, Marco Stampanoni, Lucia Romano

Biblio References: 
Volume: 588 Pages: 152938
Origin: 
Applied Surface Science
Link: 
https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…

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