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The deposition of crystalline TiO2 on polymers can boost its use in a large plethora of applications. In this work, we deposited, through the low-temperature atomic layer deposition (LT-ALD) technique, a thin layer of amorphous TiO2 on polymethyl-methacrylate (PMMA), and afterwards, we induced a phase transition from amorphous to crystalline anatase by pulsed UV-laser irradiation. A pulsed UV laser with a low penetration length was used to avoid the heating and damaging of the polymeric substrate. The diffusion of the heat and the temperature behaviour were simulated and discussed. We studied experimentally the effect of the laser fluence and pulse number on the amorphous-crystal transition. We observed the presence of two thresholds for the formation of the crystalline phase: on the fluence and the number of laser shots. Moreover, widening of pre-existing cracks is observed, as soon as fluence and the …
Publication date: 
1 Apr 2023

Massimo Zimbone, Maria Cantarella, Federico Giuffrida, Francesco La Via, Vittorio Privitera, Enrico Napolitani, Giuliana Impellizzeri

Biblio References: 
Volume: 157 Pages: 107328
Materials Science in Semiconductor Processing