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Type: 
Journal
Description: 
Publisher: 
AIP Publishing
Publication date: 
1 Jul 2022
Authors: 

A Parisini, P Mazzolini, O Bierwagen, C Borelli, K Egbo, A Sacchi, M Bosi, L Seravalli, A Tahraoui, R Fornari

Biblio References: 
Volume: 40 Issue: 4
Origin: 
Journal of Vacuum Science & Technology A