Authors: 

 

Authors: 

Maria Cantarella, Alessandro Di Mauro, Antonino Gulino, Luca Spitaleri, Giuseppe Nicotra, Vittorio Privitera, Giuliana Impellizzeri

Authors: 

Sascha Liedtke, Stefano Zampolli, Ivan Elmi, Luca Masini, Thanie Barboza, Enrico Dalcanale, Roberta Pinalli, Marvin Pähler, Carolin Drees, Wolfgang Vautz

Authors: 

Luhua Wang, Jianwei Li, Massimo Catalano, Guangzhu Bai, Ning Li, Jingjie Dai, Xitao Wang, Hailong Zhang, Jinguo Wang, Moon J Kim

The class 10 (ISO 4) clean room area (100 m2) at IMM HQ is equipped with micro- and nanofabrication facilities, employed to develop new and/or unconventional processes and to fabricate device prototypes (both on small samples and on wafer-scale) on Si and on novel/advanced materials (S

Authors: 
Authors: 

Luca Rebuffi, Andrea Troian, Regina Ciancio, Elvio Carlino, Amine Amimi, Alberto Leonardi, Paolo Scardi

Authors: 

Liberato De Caro, Elvio Carlino, Fabio Alessio Vittoria, Dritan Siliqi, Cinzia Giannini

Authors: 

P Schattschneider, S Rubino, C Hébert, J Rusz, J Kunes, P Novak, E Carlino, M Fabrizioli, G Panaccione, G Rossi

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