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MICRO/NANO FABRICATION

The Micro- and nano fabrication (MNF) network has the capacity to produce excellent scientific research and has the potential to support the various research activities starting from basic research up to applied research with high TRL.

The MNF-network has necessary expertise and state-of-the-art technological facilities (about 1400 m3 ISO 5-8 Clean Room and more than 170 equipment) distributed over 7 sites in Italy able to investigate and develope a wide set of processes covering the whole chain for the fabrication of

  • Micro and nano electronics
  • Photonic devices
  • MEMS and MOEMS

The network also has a strong application connotation, and is potentially capable of favoring and encouraging technology transfer to small, medium and large companies both in Italy and abroad. It is also able to support small and medium production.

MNF network is inside the Italian network of research infrastructures in the field of nanofabrication (It-Fab).

 

COORDINATOR: FULVIO MANCARELLA

 

OPTICAL AND LASER LITHOGRAPHY
  • NEAR UV - OPTICAL CONTACT LITHOGRAPHY
  • DEEP UV - OPTICAL CONTACT LITHOGRAPHY
  • LASER LITHOGRAPHY

For more details see the following links

NANOLITHOGRAPHY AND NANOPROCESSING
  • ELECTRON BEAM LITHOGRAPHY
  • FOCUS ION BEAM and GIS (GAS INJECTION SYSTEM)
  • SOFT NANOIMPRINT
  • SOFT MASTER REPLICATION TOOLS

For more details see the following links

GROWTH, DEPOSITION AND THERMAL PROCESSES
  • LPCVD SYSTEM
  • PVD SYSTEM
  • ALD SYSTEM
  • SPUTTERING & ELECTRON GUN
  • ELECTRODEPOSITION
  • PRINTING SYSTEM

For more details see the following links

WET AND DRY ETCHING
  • METALS, SILICON, AND III-V MATERIALS DRY ETCHING
  • ICP & BOSCH PROCESS for SILICON, GLASS, AND III-V MATERIALS
  • SURFACE CLEANING

For more details see the following links

MICROSYSTEM PROCESSES
  • ICP AND DEEP-RIE ETCHING
  • WAFER BONDING @ WAFER LEVEL
  • TMAH/KOH WET ANISOTROPIC ETCHING
  • THICK METAL FILM BAY ELECTROPLATING DEPOSITION

For more details see the following links

ION IMPLANTATION
  • LOW AND MEDIUN ION INPLANTATION
  • HIGH ENERGY ION IMPLANTANTION

For more details see the following links

METROLOGY, CONTROL AND ELECTRICAL CHARACTERIZATION
  • SEMI-AUTOMATIC ELECTRICAL PROBE STATION
  • OPTICAL AND MECHANICAL PROFILOMETER
  • OPTICAL THICKENESS MEASUREMENT
  • ELLIPSOMETER
  • SCAN TUNNEL MICROSCOPY

For more details see the following links

PACKAGING
  • MANUAL WIRE BONDER
  • WAFER BONDER @ WAFER LEVEL
  • HIGH PRECISION DICING SAW
  • SCRUBBER

For more details see the following links

SIMULATION AND DESIGN
  • LAYOUT MASK DESIGN
  • DEVICE AND PROCESS SIMULATION
  • ION IMPLANTATION SIMULATION

For more details see the following links

 

AGRATE UNIT BOLOGNA UNIT ROME UNIT NAPLES UNIT
 
LECCE UNIT CATANIA HQ UNIT CATANIA UNIT