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Micro/nano fabrication

The activities performed in this technological area firstly aim at mantaining and developing the competencies and the equipment necessary to support the research activities related with the micro/nano fabrication of microelectronic devices and microsystems that are the main institute topics.

The facilities available in each Unit build up a complete network of technological infrastructure suitable for investigating and developing a wide set of processes covering the whole chain for the fabrication of micro/nano electronic and photonic devices, MEMS and MOEMS. The activities carried out span from fundamental studies to applied researches characterized by a high Technological Readiness Level and, if required, by a small scale prototype production.

 

Coordinator: Gian Carlo Cardinali

Advanced Micro And Nano DEvices laboratory - "AMANDE lab"

 

The laboratory is equipped with a cleanroom for the realization of devices for  nano and micro (opto) - electronics, micro electro mechanical systems...

Micro/nano fabrication at Bologna Unit

 

Peculiar of IMM Bologna facilities is the availability of a 500 m2 clean-room, with 100 (ISO 5) and 100000 (ISO 8) class laboratories, fully equipped...

Micro and nano fabrication - Rome Unit

 

In the IMM-Rome a 300 sq. meters of class 1000-10000 controlled environment is available, located on the ground floor of the building, and used for research in solid state,...

Micro and nanofabrication facilities at Catania UNIV.

 

MBE system (Contact Person: Antonio Terrasi) UV & Nanoimprinting Lithography (Contact Person: Salvo Mirabella) Magnetron Sputtering 8” (Contact Persons: Maria Miritello and Francesco...
IMM-Naples Micro/Nano Fabrication Clean Room

 

The IMM – Naples Micro/nano Fabrication Clean Room is a multidisciplinary facility dedicated to Research and Development of nanotechnology, bio-sensing applications,...

Micro and nanofabrication facilities at Catania HQ

Clean room

The class 10 (ISO 4) clean room (100 m2 area) at IMM HQ is equipped with micro- and nanofabrication facilities, employed to develop new and...

Micro/Nano fabrication - Agrate Unit

1 Optical lithography (Contact Person: Mario Alia)

2 e-beam lithography (EBL)

3 Metal assisted chemical etching (MACE) (Contact Person: Matteo Belli)

4 Block Copolymer (BCP)...