The research aims to the development of MEMS using thin piezoelectric film deposited by sputtering process. In particular, the optimization of the deposition parameters, in order to obtain highly oriented piezoelectric films (AlN, ZnO, etc.) on several substrates, and surface and bulk micromachining techniques to define suspended structures (i.e. membranes and cantilevers), are the main activities carried out in this topic. Different MEMS devices, such as Film Acoustic Wave Resonators (FBARs), Solidly Mounted Resonators (SMRs), and Lamb acoustic wave devices, are modelled, designed, micro-fabricated and tested to implement RF filters or sensors.
Personnel: Fabio Di Pietrantonio, Massimiliano Benetti, Domenico Cannatà