Multiwalled carbon nanotube (MWCNT) films have been deposited by using plasma-enhanced chemical vapor deposition (PECVD) system onto alumina substrates, provided with 6 nm thick cobalt (Co) growth catalyst for remarkably improved N O 2 gas sensing, at working temperature in the range of 100– 2 5 0 ∘ C . Functionalization of the MWCNTs with nanoclusters of gold (Au) sputtering has been performed to modify the surface of carbon nanotube networked films for enhanced and specific N O 2 gas detection up to sub-ppm level. It is demonstrated that the N O 2 gas sensitivity of the MWCNT-based sensors depends on Au-loading used as surface-catalyst. The gas response of MWCNT-based chemiresistor is attributed to p-type conductivity in the Au-modified semiconducting MWCNTs with a very good short-term repeatability and faster recovery. The sensor temperature of maximum N O 2 sensitivity of the Au-functionalized MWCNTs is found to decrease with increasing Au-loading on their surface, and continuous gas monitoring at ppb level of N O 2 is effectively performed with Au-modified MWCNT chemiresistors.
1 Jan 2008
Journal of Sensors