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The aim of this work is the fabrication of a cheap sol-gel Pt-doped TiO2 thin film sensor on silicon substrate, evaluate electrical performances of electrical interconnections and responses of sensitive film in severe environment like exhaust of combustion process. The sensor will be implemented as microsensors for NOx or oxygen detection, while a preliminary investigation on real operative conditions shows that the transducers perform a response time (t90) in real condition smaller than 1 second at 600 °C. Application field of this type of transducer will be evaluated in a real spark ignition engine, to monitor air/fuel ratio and also monitoring the combustion quality in other industrial combustion processes like domestic heating systems. The production process of this devices, and particularly thin film deposition, can be carried out on a 3" silicon wafer and obtaining with a single batch process more than 300 sensors for …
International Society for Optics and Photonics
Publication date: 
1 Jul 2005

Luca Francioso, Dominique Sara Presicce, Mauro Epifani, Pietro Siciliano, Antonio Ficarella

Biblio References: 
Volume: 5836 Pages: 255-262
Smart Sensors, Actuators, and MEMS II