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SixCryCzBv thin films with several compositions have been studied for integration of high precision resistors in 0.8 μm BICMOS technology. These resistors, integrated in the back-end of line, have the advantage to provide high level of integration and attractive electrical behavior in temperature, for analog devices. The film morphology and the structure have been investigated through transmission electron microscopy analysis and have been then related to the electrical properties on the base of the percolation theory. According to this theory, and in agreement with experimental results, negative thermal coefficient of resistance (TCR) has been obtained for samples with low Cr content, corresponding to a crystalline volume fraction below the percolation threshold.Samples with higher Cr content exhibit, instead, a variation of the TCR as a function of film thickness: negative TCR values are obtained for thickness lower …
Publication date: 
1 Mar 2010

S Privitera, F Wang, C Niu, P Dumont-Girard, H Ding, K Liu, R Modica, C Bongiorno

Biblio References: 
Volume: 87 Issue: 3 Pages: 430-433
Microelectronic engineering