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Type: 
Conference
Description: 
In this work we report the growth of C-based nanostructures by means of radio-frequency (RF) magnetron sputtering at different temperatures. We found that the deposition temperature has a huge influence on the structure and chemical composition of the C-based materials obtained. In the temperature range 400degC-600degC we obtain nanocolumns made of carbon and nitrogen (CNx), due to the incorporation of the sputtering gas, whilst at a deposition temperature of 700degC the formation of carbon nanotubes (CNT) takes place. The effect of thermal processes on the morphology and the chemical composition of the grown C nanostructures has been investigated by scanning electron microscopy, transmission electron microscopy and Raman spectroscopy
Publisher: 
IEEE
Publication date: 
2 Oct 2007
Authors: 

S Scalese, V Scuderi, F Simone, A Pennisi, G Compagnini, V Privitera

Biblio References: 
Pages: 123-126
Origin: 
2007 15th International Conference on Advanced Thermal Processing of Semiconductors