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In this paper we used three dimensional kinetic Monte Carlo simulations on super-lattices to study the hetero-polytypical growth of cubic silicon carbide polytype (3C-SiC) on hexagonal 6H-SiC substrates with miscuts towards the< 11-20> and< 1-100> directions. We analyze the grown film for different miscut angles (in the range 2 to 12 degrees) and different growth rates, finding that substrates with miscut of 3-4 degrees towards the< 1-100> direction should be the best choice for the growth of high quality cubic epitaxial films, being able to promote, given a suitable pre-growth treatment to induce step bunching, the nucleation of single domain 3C-SiC films.
Trans Tech Publications Ltd
Publication date: 
1 Jan 2014

Massimo Camarda, Antonino La Magna, Francesco La Via

Biblio References: 
Volume: 778 Pages: 238-242
Materials Science Forum