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The crystallization dynamic of amorphous GeTe 50 nm thick films deposited on a SiO2/Si substrate by RF magnetron sputtering, either ion implanted by Ge+ ions or not, has been analyzed in situ by optical microscopy during annealing in the 143–155 °C temperature range. Raman spectroscopy has been also performed in as deposited, ion implanted (i.i.) and melt quenched (m.q.) amorphous samples to compare the local order among the different amorphous structure. Nucleation and growth rates, for i.i. and as deposited samples, have been observed and directly compared by optical microscopy in a region of about 5 × 104 μm2. From these data, the activation energy and pre-exponential terms of each process have been calculated. The nucleation rate and growth velocity of the i.i. films increased by a factor thirteen and a factor three with respect to the as deposited samples. This evidence, in agreement with …
Publication date: 
1 May 2011

AM Mio, E Carria, G D'Arrigo, S Gibilisco, M Miritello, MG Grimaldi, E Rimini

Biblio References: 
Volume: 357 Issue: 10 Pages: 2197-2201
Journal of non-crystalline solids