The refractive indexes, material attenuation and damage fractions of a multi-step ion implanted Lithium Niobate (LiNbO_3) waveguide were analyzed as functions of the annealing temperatures. An almost flat damage depth profile was designed to reduce the uncertainties related to the indexes profile shape, thus providing a better test-case for the characterizations. The measurements performed on the fabricated optical waveguides confirmed the predicted step-index profiles showing that the light is confined inside the damaged layer. The low measured attenuation (less than 0.8 dB/cm @ 632.8 nm) makes the obtained waveguide attractive for device fabrication.
Optical Society of America
13 Feb 2012
Volume: 20 Issue: 4 Pages: 4444-4453