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Type: 
Conference
Description: 
We propose a comparison among different solutions for realizing polysilicon thermoelectric transducers, with five different types of thermoelements based on Al/polysilicon and two level polysilicon design, using different doping (of p and n-type) for the poly layers. The device performances are evaluated on a test geometry with electrical measurements and the performance obtained with the various solutions are compared.
Publisher: 
IEEE
Publication date: 
22 Oct 2006
Biblio References: 
Pages: 1235-1238
Origin: 
SENSORS, 2006 IEEE