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This paper presents a comprehensive procedure for the design and implementation of thin film heaters manufactured on glass substrates. The thermal and electrical behavior of the heaters have first been simulated and proper design solutions have been adopted for increasing the thermal resistance of the heaters, thus decreasing their power consumption. Trenches were adopted in order to thermally isolate the heater from the glass substrate. The presence of four different layouts of trenches on the back and the front side of the glass slide with different geometries was extensively simulated. The simulated geometries were manufactured and an automatic sawing machine was exploited to dig 240 μm wide trenches in the glass substrate. The trenches were typically stopped at about 80 μm from the opposite surface. Techniques commonly adopted for measuring the temperature coefficient of resistance, the thermal …
Publication date: 
15 Jun 2015

A Scorzoni, D Caputo, G Petrucci, P Placidi, S Zampolli, G De Cesare, M Tavernelli, A Nascetti

Biblio References: 
Volume: 229 Pages: 203-210
Sensors and Actuators A: Physical